Email:Louis@lithmachine.com
ItemNo :
LITH-650MHMOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 daysEmail :
Louis@lithmachine.com
Introduction
High Vacuum Magnetron Ion Sputtering Coater is ideal and designed for materials science and sample preparation. It is widely used for the majority of universities and scientific research institutes of materials science and engineering to coat, for metals, ceramics, semiconductors, insulators or other kinds of membrane material preparation.
High Vacuum Magnetron Ion Sputtering Coater provides the most stable sputtering environment and achieves the basic experimental conditions of magnetron sputtering in a very short period of time. It provides DC / RF two kinds of sputtering power options which allow sputtering conductive or non-conductive substance on specimen and improves physical vapor deposition (PVD) Performance. It is also excellent for surface treatment and coating. It is easy to operate and user friendly as well.
Vacuum pump and Chiller are included.
Parameter
Vacuum pump set
(Oil required) rotary vacuum pump+(oil free) turbo moleculan pump set
Rotary pumping speed
50 Hz : 16 m³/h (4.4 L/s)/ 60 Hz : 19.2m³/h (5.2 L/s)
Molecular pumping speed
300 L/s
Vacuum limit
5x10-5Pa
Working pressure
0.5-5 Pa
Vacuuming time
>10 Min(10-3Pa)
Vacuum measure
Measuring range from atmosphere to 1*10-6Pa
Gas control
Gas flow controller
Chamber size
φ260*200mm (height) metal
Magnetron target source
Target size φ 50*3mm(Cu)/target source: weak magnetic substance /materials
Operation method
Instruction Manual
Weight/size
100kg/610mm length x 420mm wide x 490mm high
Power supply
AC 110V 60Hz or AC 220V 50Hz
Power consumption
<3000W
Cooling method
Air cooling(pump)+ water cooling(sputtering target)
Warranty
One year limited warranty with lifetime product support
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damaged part for you for free.
DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to
production season and order quantity.
Subscribe to us
ONLINE
Louis@lithmachine.com
+0086 15959378975
