Small 4" RTP Tube Furnace System With Turbomolecular Vacuum Station & Complete Acessories

ItemNo :
LITH-1200X-RTP-HV-LD
MOQ :
1
Compliance:
CE
Warranty:
2 years
Delivery Time:
5 days
Email :
Louis@lithmachine.com

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Product Details

Small 4" RTP Tube Furnace System With Turbomolecular Vacuum Station & Complete Acessories

LITH-1200X-RTP-HV-LD is a UL certifiable compact rapid thermal processing tube (4" I.D.) furnace with High Vacuum Station (diaphragm pump + turbo molecular pump) and KF-D25 vacuum flange assembly. It is designed for annealing semiconductor wafer or solar cell up to 3" diameter. The furnace is heated by 8 units of 1KW halogen light around the processing tube with a max. heating rate of max. 50C/second. 50 segments precision temperature controller is built in with accuracy +/-1° C.

Furnace	structure	Compact 4“ RTP Tube Furnace（Double layer steel case mullite liner)
	Heating element	8 pcs Halogen light tube (D=10 L=300 T =200, mm)
	Working Temp.	1100° C max. (This RTP furnace's max holding time shall be less than 600 seconds at 1000ºC ~ 1100ºC, otherwise O-ring may get melting )
	Max heating rate	50° C/sec
	Max cooling rate	64° C/min (Under vacuum: 200 mtorr), 117° C/min (Under atmosphere pressure)
	Heating zone	12" length with 4" constant temperature zone within +/-1°C uniformity
	Program Temp. Controller	PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor. 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Please click here to learn why SCR is more accurate than SSC (Solid state relay). Built in PID Auto-Tune function with overheating & broken thermocouple broken protection. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy. RS485 Communications Port. PC Control: A MTS-02 control module is included for PC control on this furnace. The new version of PC module is now compatible with Lab View 05/08/2014 A laptop PC can be ordered for $900 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping.
	Quartz Tube & Sample Holder	Quartz Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length 3" diameter Sample holder is inserted to sliding flange, which is made of quartz One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia. AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area The sample holder is removable from flange
	Vacuum flange	KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves. Sliding flange make an easy way for sample loading. 3" Quartz sample holder.Insert-able thermal-couple for accurate measurement.
	Water Cooling Jacket	Cooling water is required. Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI. We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water. Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt. With use of a recirculating water chiller, this holding time can be extended to 1200 seconds.
	Flow meter	One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min
	Power input	208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required)
HV Station High Vacuum Station	Structure	Mobile cart size: 600 (L) x 600 (W) x 700(W), mm Max. Loading: 600 Lbs on top Molecular pump control Panel : LCD digital Diaphragm Pump and Turbo Molecular Pump are installed inside the steel case.
	Vacuum Degree	6.3E-5 mbar (with 4" RTP tube furnace in 40 minutes)
	Control panel	One button operation - the diaphram pump and the turbo molecular pump will start after pressing "start" button. System controlled spining speed - the controller will control the speed of the turbine spining up and down according to the vacuum level and leaking rate of the reaction chamber. Self protection - the system will protect the pump from damage by overheating and overcurrect if the leaking rate of the reaction chamber is too high to achieve high vacuum. LCD screen - double lines parameters checking interface make the working easier to be handled. Self testing Spinning up
	Start-up time	2 minutes
	Backing Pump Volume Flow Rate at 10 mbar	3.8 L/min for 50Hz and 4.4 L/min for 60Hz
	Power input	110V AC or 220V AC switchable, 50/60Hz
	Power consumption	Duration/Max power: 100/110Watt
Shipping Info	Weight and Dimension	RTP furnace: 110 lbs, 760 x 330 x 530mm (30" x 13" x 21" inch) L x W x H HV station: 40 lbs, 600 x 600 x 700mm (24" x 24" x 28") L x W x H
Warranty	Two years limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.)
Laptop, software & WiFi Control (Optional)	Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use. Labview Based Temperature Control System enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces. A wireless remote control provides up to 300 meters operating range. Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
Compliance	CE Certified The furnace is ready to pass UL 61010, IEC 61010, SPE-1000 tested by NRTLs at extra cost. Please contact us for quote and detail information. Temperature controller is MET and CE Certified High Vacuum Station is TUV Certified