ItemNo :
Lith-4QMOQ :
1Compliance:
CE CertifiedWarranty:
1 yearDelivery Time:
5 daysEmail :
Louis@lithmachine.com
Key Features:
1. Support 12-inch silicon wafer spin coating
2. The maximum speed can reach 6000 rpm.
3. Acceleration 10- 1000RPM/S continuously adjustable
4. With Bluetooth communication
5. Support standard 485modbus communication
6. Free PC control software.
Spin Coater Specifications (KW-4Q Spin Coater)
Substrate size |
200-300mm (8 inches to 12 inches) |
Speed range |
10-6000RPM |
Acceleration range |
10- 1000RPM/S, Adjustable |
Motor speed stability |
±1RPM |
Spin coating uniformity |
±1% |
Human machine interface |
8-inch touch screen |
Communication interface |
USB (standard)/RS485 (optional)/Bluetooth (standard) |
Turn around |
Support forward and reverse |
Stylus |
Stylus BAMBOO resistance pen (standard) |
Vacuum Pump |
SC-550V |
Set data |
Unlimited groups of data, each group has 15 speeds (standard) or unlimited speeds (optional) |
Seconds per period |
0- 10000s |
Storage data |
Unlimited data |
Data protection |
default with power-down protection |
Operating voltage(Spin Coater) |
AC100-250V, single phase, 50/60Hz |
Operating voltage(Pump) |
AC220V(Standard) AC110V(Optional) |
Pumping speed |
≥60L/MIN |
Max vacuum |
-85KPA |
Sound Level |
≤55db |
Spin coater power |
2KW |
Pump power |
350W |
Dimensions(Spin Coater) |
550mm(W)X550mm(D)X350mm(H) |
Weight(Spin Coater) |
50KG |
Weight(Pump) |
9KG |
Relative humidity |
< 85% |
Ambient temperature |
0-40℃ |
Warranty |
1 year |
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damaged part for you for free.
DELIVERY TIME:15-20 days after confirming the order, detail delivery date should be decided according to
production season and order quantity.